Local topographical changes of Ge-(Sb)-Se thin films induced by direct electron beam writing
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216275%3A25310%2F25%3A39923388" target="_blank" >RIV/00216275:25310/25:39923388 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1016/j.ceramint.2025.03.128" target="_blank" >https://doi.org/10.1016/j.ceramint.2025.03.128</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.ceramint.2025.03.128" target="_blank" >10.1016/j.ceramint.2025.03.128</a>
Alternative languages
Result language
angličtina
Original language name
Local topographical changes of Ge-(Sb)-Se thin films induced by direct electron beam writing
Original language description
Local topographical changes are studied in Ge-Se and Ge-Sb-Se thin films induced by focused electron beam exposure. The results show that under comparable experimental conditions, the Ge29.2Se70.8 film undergoes expansion, while in Ge-Sb-Se compositions (Ge17.9Sb16.6Se65.5, Ge11.4Sb22.9Se65.7), the material is preferentially removed instead. Variations in electron beam parameters, including exposure time, spot size, and magnification, as well as the thermodynamic state of the thin films (virgin vs. annealed), are studied to characterize their influence on material response (height/depth of micro-objects). Force spectroscopy (FS), atomic force microscopy (AFM), energy dispersive X-ray analysis (EDX) and digital holographic microscopy (DHM) are used to characterize the micro-objects created and to identify possible changes in stiffness and chemical composition of the films studied. Observed findings demonstrate that electron beam direct writing can be used to locally modify the surface of Ge-(Sb)-Se thin films, enabling the fabrication of micro-optical elements such as microlenses.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10402 - Inorganic and nuclear chemistry
Result continuities
Project
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Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2025
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Ceramics International
ISSN
0272-8842
e-ISSN
1873-3956
Volume of the periodical
51
Issue of the periodical within the volume
18
Country of publishing house
GB - UNITED KINGDOM
Number of pages
9
Pages from-to
24450-24458
UT code for WoS article
001533667800001
EID of the result in the Scopus database
2-s2.0-86000720194