Resolution Limits of Low Voltage BSE Imaging in Scanning Electron Microscopy Resolution Limints of Low Voltage BSE Imaging in Scanning Electron Microscopy
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26210%2F15%3APU114229" target="_blank" >RIV/00216305:26210/15:PU114229 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Resolution Limits of Low Voltage BSE Imaging in Scanning Electron Microscopy Resolution Limints of Low Voltage BSE Imaging in Scanning Electron Microscopy
Original language description
Scanning electron microscopy is an important part of material sciences and brings new perspectives into study of materials. Modern material engineering follows tend to develop materials in nanoscale. There can arise many problems with analysis and even electron microscopy can reach its borders. Conventional access allows to analyse parts of the materials with size of about few microns or hundreds of nanometres. This restriction is caused by construction of detectors which requires electrons with relatively high energy. As an example can be mentioned four-quadrant silicon detector of back scattered electrons (AsB). This detector is able to detect electrons with energies in range 5-30 keV (ideally 10-20 keV). Interaction volume and penetration depth of electrons with a high landing energy is about 1-2 micrometers. Therefore, there is limitation in the size of the observed parts of the materials. This problem can be reduced using electron microscopy at low landing energy (0.1-3 keV). Inte
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JJ - Other materials
OECD FORD branch
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Result continuities
Project
<a href="/en/project/LO1202" target="_blank" >LO1202: NETME CENTRE PLUS</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2015
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
MULTI-SCALE DESIGN OF ADVANCED MATERIALS CONFERENCE PROCEEDINGS
ISBN
978-80-214-5146-9
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
30-35
Publisher name
Brno University of Technology
Place of publication
Brno
Event location
Velké Bílovice
Event date
May 28, 2015
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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