Transmission mode in scanning low enery electron microscope

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F10%3A00350667" target="_blank" >RIV/68081731:_____/10:00350667 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Transmission mode in scanning low enery electron microscope
Original language description
We incorporated the cathode lens (CL) principle, well known from the emission microscope, to the SEM in order to operate at very low landing energies. The primary beam electrons of several keV are decelerated to nearly zero energy of landing on the specimen negatively biased to high potential. Reflected electrons are collected on a grounded detector situated above the sample but the same can be done below the sample of a fair transparency for electrons. High collection efficiency and high amplificationof both detectors is secured thanks to the cathode lens field. We use a scintillation detector for the reflected mode and a semiconductor structure for the transmitted electron (TE) mode. In this arrangement resolution of few nm is obtainable across thefull energy range.
Czech name
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Czech description
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Project
<a href="/en/project/IAA100650902" target="_blank" >IAA100650902: Scanning transmission electron microscopy with very slow electrons</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Proceedings of the 12th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
ISBN
978-80-254-6842-5
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
Institute of Scientific Instruments AS CR, v.v.i
Place of publication
Brno
Event location
Skalský dvůr
Event date
May 31, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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