Scanning Electron Microscopy with Samples in an Electric Field

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F12%3A00385193" target="_blank" >RIV/68081731:_____/12:00385193 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.3390/ma5122731" target="_blank" >http://dx.doi.org/10.3390/ma5122731</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.3390/ma5122731" target="_blank" >10.3390/ma5122731</a>

Result language

angličtina

Original language name

Scanning Electron Microscopy with Samples in an Electric Field

Original language description

The high negative bias of a sample in a scanning electron microscope constitutes the ?cathode lens with a strong electric field just above the sample surface. This mode offers a convenient tool for controlling the landing energy of electrons down to units or even fractions of electronvolts with only slight readjustments of the column. Moreover, the field accelerates and collimates the signal electrons to earthed detectors above and below the sample, thereby assuring high collection efficiency and high amplification of the image signal. One important feature is the ability to acquire the complete emission of the backscattered electrons, including those emitted at high angles with respect to the surface normal. The cathode lens aberrations are proportional to the landing energy of electrons so the spot size becomes nearly constant throughout the full energy scale. At low energies and with their complete angular distribution acquired, the backscattered electron images offer enhanced infor

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year

2012

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Materials

ISSN

1996-1944

e-ISSN

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Volume of the periodical

5

Issue of the periodical within the volume

12

Country of publishing house

CH - SWITZERLAND

Number of pages

26

Pages from-to

2731-2756

UT code for WoS article

000312608500016

EID of the result in the Scopus database

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