Electron beam induced current measurement on a specimen biased in a cathode lens
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F09%3A00335265" target="_blank" >RIV/68081731:_____/09:00335265 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Electron beam induced current measurement on a specimen biased in a cathode lens
Original language description
The retarding potential between the specimen and an anode, a cathode lens, is already commonly used for high resolution imaging at very low electron beam energies, even below 10 eV, in a scanning electron microscope (SEM). Standard configuration consistsof an electron column (either magnetic or electrostatic), YAG single-crystal scintillator positioned under the objective lens, used as an anode, and an insulated specimen used as a cathode of the cathode lens. The microscope with the cathode lens can beused not only to acquire standard signals as secondary electrons (SE) and backscattered electrons (BSE); transmitted electrons (STEM) and electron beam induced current (EBIC) can be used as well. Two problems are addressed. First, we have to bring a high voltage on the insulated specimen in the microscope chamber, and second, we have to solve the induced current measurement on the high voltage level.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Result continuities
Project
<a href="/en/project/IAA100650803" target="_blank" >IAA100650803: Coherent imaging of nanostructures in a low-energy scanning electron microscope with an area detector of electrons</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
MC 2009 - Microscopy Conference: First Joint Meeting of Dreiländertagung and Multinational Conference on Microscopy
ISBN
978-3-85125-062-6
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
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Publisher name
Verlag der Technischen Universität
Place of publication
Graz
Event location
Graz
Event date
Aug 30, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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