Practical Use of Scanning Low Energy Electron Microscope (SLEEM)

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F16%3A00465457" target="_blank" >RIV/68081731:_____/16:00465457 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1017/S1431927616009090" target="_blank" >http://dx.doi.org/10.1017/S1431927616009090</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1017/S1431927616009090" target="_blank" >10.1017/S1431927616009090</a>

Result language
angličtina
Original language name
Practical Use of Scanning Low Energy Electron Microscope (SLEEM)
Original language description
The high negative bias of a sample in a scanning electron microscope constitutes the cathode lens (CL), with a strong electric field just above the sample surface [1] offers a tool for controlling the landingnenergy of electrons down to units or even fractions of electronvolts. Moreover, the field accelerates and collimates the signal electrons to earthed detectors above and below the sample, thereby assuring highncollection efficiency and high amplification of the image signal. One important feature is the ability to acquire the complete emission of the backscattered electrons, including those emitted at high angles with respect to the surface normal. The cathode lens aberrations are proportional to the landing energy of electrons, so the spot size becomes nearly constant throughout the full energy scale.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2016
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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