Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F02%3APU29095" target="_blank" >RIV/00216305:26220/02:PU29095 - isvavai.cz</a>
Alternative codes found
RIV/61389021:_____/02:52020033
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Deposition of Diamond Films in Arc Plasma Jet at Atmospheric Pressure
Original language description
Study of diamond growth was made in atmospheric pressure dc arc jet with high ratio of carbon to hydrogen flow rates. A plasma torch was designed for operation with mixture of argon, hydrogen, and methane. Films deposited on cooled Mo substrate were analyzed using scanning electron microscopy and Raman spectroscopy. Polycrystalline films were created with typical crystal size of several microns, the ratio of content of diamond structures to non-diamond forms of carbon was strongly dependent on ratio offlow rates of hydrogen and methane and on orientation of surface with respect to plasma flow. Effect of parameters of plasma jet as well as effect of position and orientation of substrate surface in the plasma flow on composition and growth rate of filmswas investigated.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GV106%2F96%2FK245" target="_blank" >GV106/96/K245: Hard and superhard coatings prepared by unconventional plasma processes</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2002
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Czechoslovak Journal of Physics
ISSN
0011-4626
e-ISSN
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Volume of the periodical
52
Issue of the periodical within the volume
suppl. D
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
8
Pages from-to
878-885
UT code for WoS article
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EID of the result in the Scopus database
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