A new tool for the post-process modification of chips by nanostructures for chemical sensing
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F09%3APU84190" target="_blank" >RIV/00216305:26220/09:PU84190 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
A new tool for the post-process modification of chips by nanostructures for chemical sensing
Original language description
The tool is built up on moving plates driven by step-motors for precise location of sensors chip on the wafer to perform post-processing of the chip. The tool can make chemical or electrochemical deposition and etching for the chip modification after wafer processing. Each chip on the wafer can be modified with different process. The deposition from solutions and wet etching is controlled by a flow-system and power source if it is necessary. Techniques for ordered nanostructures creation using the toolwere also developed. The tool helps to improve properties of microsensors fabricated on the chip by thin-film and semiconductor technology.
Czech name
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Czech description
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Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
<a href="/en/project/1QS201710508" target="_blank" >1QS201710508: Impedimetric chemical microsensors with nanomachined surface of electrodes</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Eurosensors XXIII: Sensors, Actuators and Micro/Nanosystems
ISSN
1876-6196
e-ISSN
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Volume of the periodical
2009
Issue of the periodical within the volume
1
Country of publishing house
CH - SWITZERLAND
Number of pages
4
Pages from-to
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UT code for WoS article
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EID of the result in the Scopus database
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