TEMPERATURE DEPENDENCE OF LOW FREQUENCY NOISE IN TA2O5 FILMS
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F11%3APU93448" target="_blank" >RIV/00216305:26220/11:PU93448 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
TEMPERATURE DEPENDENCE OF LOW FREQUENCY NOISE IN TA2O5 FILMS
Original language description
The paper has focused on analysis of noise measurement in Ta2O5 insulating films. Tan-talum pent-oxide thin films are used as dielectric layers for capacitors. Tantalum capacitors show high relative permittivity, low leakage current density and high reliability. The capacitor is here presented as a MIS structure where cathode is formed by manganese-dioxide (with semiconductor conductivity) and anode is formed by tantalum (with metal conductivity). Capacitor is operated in normal mode when the anode is positive and in reverse mode when the cathode is positive. The measurement set-up allows the low frequency noise and capacity measurements in the wide tem-perature range. The Ta2O5 films of the thickness about 28 nm were examined. The current noise spectral density was analyzed for the temperature range from 10 to 400 K. GR noise and 1/fa noise are observed in the low frequency region with exponent a varying between 1 and 1.5. From the measurement of sample capacity for different temperat
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BM - Solid-state physics and magnetism
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
PROCEEEDINGS OF THE 16TH CONFERENCE - STUDENT EEICT 2010
ISBN
978-80-214-4079-1
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
351-355
Publisher name
NOVPRESS s.r.o.
Place of publication
nam. Republiky 15 614 00 Brno
Event location
Brno
Event date
Apr 28, 2011
Type of event by nationality
CST - Celostátní akce
UT code for WoS article
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