Negatively Charged Al2O3 Layers Deposited by Magnetron Sputtering and Vacuum Evaporation for Crystalline Silicon Solar Cell BSF

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F11%3APU94352" target="_blank" >RIV/00216305:26220/11:PU94352 - isvavai.cz</a>
Alternative codes found
RIV/45309787:_____/11:#0000011
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Negatively Charged Al2O3 Layers Deposited by Magnetron Sputtering and Vacuum Evaporation for Crystalline Silicon Solar Cell BSF
Original language description
The main goal of our work is utilization of well established vacuum technologies as magnetron sputtering and vacuum evaporation for transfer of the aluminum oxide deposition process from ALD (Atomic layer deposition) technique to the industrial sputtering system with the aim to implement high quality back-surface field (BSF) passivation into a large and effective deposition system in the technology processes of Solartec company. The passivation effect is tested by MW-PCD (Microwave Photoconductance Decay) measuring method with deposition of identical passivation layers on both sides of Czochralski (CZ) p- and n-type substrates.
Czech name
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Czech description
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Project
<a href="/en/project/FR-TI1%2F603" target="_blank" >FR-TI1/603: Effective coating technology of thin passivation and antireflection layers for production of crystalline solar cells</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
EU PVSEC Proceedings, 26th European Photovoltaic Solar Energy Conference and Exhibition
ISBN
3-936338-27-2
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
1783-1786
Publisher name
WIP Wirtschaft und Infrastruktur GmbH & Co Planungs KG
Place of publication
Sylvensteinstr. 2 81369 München Germany
Event location
Hamburg
Event date
Sep 5, 2011
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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