Using of Templates Base Method for Fabrication of Nanorods Structures for Electrochemicalsensing Elements
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F11%3APU95583" target="_blank" >RIV/00216305:26220/11:PU95583 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26620/11:PU95583
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Using of Templates Base Method for Fabrication of Nanorods Structures for Electrochemicalsensing Elements
Original language description
The porous alumina attracts attention because of its self-ordered hexagonal structure. It can be used as a template nanosize structure, for many devices such as magnetic, electronic and optoelectronic. The aim of this method is preparation of the mask for electrodepositing nanowires directly on Si substrate. The presented technique without utilization of high-resolution electron-beam lithographs belongs to low-cost technology in the microelectronic industry. Anodic alumina has been prepared in several electrolytes by the anodization process and the characteristics of pore structures have been studied in different anodizing conditions. The thickness of aluminum film for anodization was 1-2 um. The two methods for deposition of aluminum thin film on Si substrate are thermal evaporating and sputtering. The prepared alumina structures have 15-30 nm pore diameters and 30-110 nm interpore distances.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
CG - Electrochemistry
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Sborník příspěvků - XI. pracovní setkání fyzikálních chemiků a elektrochemiků (id 19294)
ISBN
978-80-7375-514-0
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
133-163
Publisher name
Mendelu v Brně
Place of publication
Brno
Event location
Brno
Event date
Jun 1, 2011
Type of event by nationality
CST - Celostátní akce
UT code for WoS article
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