INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F12%3APU101137" target="_blank" >RIV/00216305:26220/12:PU101137 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
INTRINSIC RESOLUTION OF A PIEZORESISTIVE CERAMIC PRESSURE SENSOR
Original language description
A high resolution of a pressure sensor is of key importance for precise measurements in the low pressure range. The intrinsic resolution of the piezoresistive ceramic pressure sensors (CPSs) depends on its functional sensitivity and the electronic noisein the thick-film resistors. The sensitivity and the noise level depend on the material and structural properties, and the dimensions of the sensing structure. For an optimized sensor design the noise measured at its output can be reduced by using additional electronics for signal processing which results in incensement of the sensor complexity and the final cost. In this work we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. Theintrinsic resolution of the piezoresistive LTCC pressure sensors, designed for the pressure range 0 to 100 mbar was evaluated and compared to the resolution of the commercial 100-mbar silicon pressure sensor.
Czech name
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Czech description
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Project
<a href="/en/project/MEB091129" target="_blank" >MEB091129: Investigation of the noise of thick-film pressure sensors</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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