Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F13%3APU105429" target="_blank" >RIV/00216305:26220/13:PU105429 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Comparison of the Intrinsic Characteristics of LTCC and Silicon Pressure Sensors by Means of 1/f Noise Measurements

Original language description

A pressure sensor with high resolution is of key importance for precise measurements in the low-pressure range. The intrinsic resolution of piezoresistive ceramic pressure sensors (CPSs) mainly depends on their functional sensitivity and the electronic noise in the thick-film resistors. Both the sensitivity and the noise level depend on the material and the structural properties, and the dimensions of the sensing structure. In general, the sensitivity can be increased and the noise can be reduced by using additional electronics for the signal processing, but this makes the sensor bigger, more complex and more expensive. In this study we discuss the technological limits for downscaling the sensors pressure range without any processing of the sensors signal. The intrinsic resolution of the piezoresistive pressure sensors designed for the pressure range 0 to 100 mbar and realised in LTCC (Low Temperature Cofired Ceramic) technology was evaluated and compared to the resolution of a commercial 100-mbar silicon pressure sensor.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

JA - Electronics and optoelectronics

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Radioengineering

ISSN

1210-2512

e-ISSN

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Volume of the periodical

22

Issue of the periodical within the volume

1

Country of publishing house

CZ - CZECH REPUBLIC

Number of pages

6

Pages from-to

227-232

UT code for WoS article

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EID of the result in the Scopus database

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