Design and Fabrication of Piezoresistive Strain-Gauges for Harsh Environment Applications

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F10%3A00171671" target="_blank" >RIV/68407700:21230/10:00171671 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Design and Fabrication of Piezoresistive Strain-Gauges for Harsh Environment Applications
Original language description
Maximum operating temperature is usually one of the limiting factors for using of conventional sensors and other electronic devices. High-temperature sensors and electronics are required in some special applications e.g. measurement of deformations, stresses and pressures inside power generators. The design methodology of the some piezoresistive sensors utilizing FEM simulations is presented. Piezoresistive sensors based on thin-film metal sputtered layers, silicon-on-insulator (SOI) and nanocrystallinediamond layers (NCD) were successfully designed, fabricated and measured. The fabricated sensors are able to operate at temperatures up to 250 °C. Extensive study of sensor parameters e.g. deformation sensitivity, edge and contact resistances, temperature dependences gauge factor, bridge output voltage was performed. The measured values and investigated findings can be used for calibration of simulation software and in prospective design of more complex sensor structures.
Czech name
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Czech description
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Project
<a href="/en/project/GA102%2F09%2F1601" target="_blank" >GA102/09/1601: Intelligent micro and nano structures for microsensors realized with support of nanotechnology</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2010
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
International Conference on Renewable Energies and Power Quality ICREPQ'10
ISBN
978-84-613-7543-1
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
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Publisher name
Universidad de Vigo
Place of publication
Vigo
Event location
Granada
Event date
Mar 23, 2010
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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