Modeling and Fabrication of Piezoresistive Strain Sensor Based on Diamond Layers

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68407700%3A21230%2F09%3A00159528" target="_blank" >RIV/68407700:21230/09:00159528 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Modeling and Fabrication of Piezoresistive Strain Sensor Based on Diamond Layers
Original language description
High-temperature sensors and electronics are required for harsh environments where the application of conventional electronics is impossible or impractical, such as in industrial, automotive, aircraft and aerospace applications [1]. The design methodology utilizing FEM simulations is presented. Piezoresistive sensors based on thin-film metal sputtered layers, silicon-on-insulator and nanocrystalline diamond layers were successfully designed, fabricated and measured. The fabricated sensors are able to operate at temperatures up to 250 °C. Extensive study of sensor parameters e.g. deformation sensitivity, edge and contact resistances, temperature dependences gauge factor, bridge output voltage was performed. The measured values and investigated findingscan be used for calibration of simulation software and in prospective design of more complex sensor structures.
Czech name
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Czech description
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Project
<a href="/en/project/GA102%2F09%2F1601" target="_blank" >GA102/09/1601: Intelligent micro and nano structures for microsensors realized with support of nanotechnology</a><br>
Continuities
Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2009
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
45th International Conference on Microelectronics, Devices and Materials, MIDEM 2009
ISBN
978-961-91023-9-8
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
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Publisher name
MIDEM
Place of publication
Ribno at Bled
Event location
Postojna
Event date
Sep 9, 2009
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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