Design and Fabrication of MEMS Low Power Heating Membrane
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F12%3APU101360" target="_blank" >RIV/00216305:26220/12:PU101360 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—
Alternative languages
Result language
angličtina
Original language name
Design and Fabrication of MEMS Low Power Heating Membrane
Original language description
The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gassensing applications. The main goal is to produce the structure of the heating membrane using different fabrication process. Only wet etching process is used. Mainly two types of membranes are discussed ? suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1x1 mm, to ensure a suitable fabrication technology and the applicable design of the micro hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 degrees C.
Czech name
—
Czech description
—
Classification
Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
JA - Electronics and optoelectronics
OECD FORD branch
—
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
ElectroScope - http://www.electroscope.zcu.cz
ISSN
1802-4564
e-ISSN
—
Volume of the periodical
2012
Issue of the periodical within the volume
VI
Country of publishing house
CZ - CZECH REPUBLIC
Number of pages
3
Pages from-to
1-3
UT code for WoS article
—
EID of the result in the Scopus database
—