Design and fabrication of MEMS low power heating membrane
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F12%3APU98796" target="_blank" >RIV/00216305:26220/12:PU98796 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Design and fabrication of MEMS low power heating membrane
Original language description
The aim of this work is design and fabrication of micro hotplates. This type of device is often used for gas-sensing applications. The main goal is to produce the structure of the heating membrane. Two types of membranes are discussed ? suspended and close type of the membrane. The sample which is going to be produced will be a membrane with the size of 1 mm2, to ensure a suitable fabrication technology and the applicable design of the micro-hotplate. The micro hotplates power consumption has to be up to 100 mW at the operating temperature 480 C.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
CG - Electrochemistry
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
XII. Pracovní setkání fyzikálních chemiků a elektrochemiků
ISBN
978-80-7375-618-5
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
303-304
Publisher name
Mendelova univerzita v Brně
Place of publication
Brno
Event location
Brno
Event date
May 30, 2012
Type of event by nationality
CST - Celostátní akce
UT code for WoS article
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