Low power MEMS heating membrane
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F12%3APU99549" target="_blank" >RIV/00216305:26220/12:PU99549 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Low power MEMS heating membrane
Original language description
This paper reports on design and fabrication of the low power MEMS heating membrane - micromachined hotplates. This type of device is very often used for gas-sensing applications. The aim of this work is to produce heating membrane with the power consumption below 100 mW at the operating temperature 480 C. The sample which is going to be produced will be the membrane with size of 1x1 mm, to ascertain the applicable process of the fabrication technology and the applicable design of the micro-hotplate.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
EDS 12 IMAPS CS INTERNATIONAL CONFERENCE PROCEEDINGS
ISBN
978-80-214-4539-0
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
257-260
Publisher name
Vysoké učení technické v Brně
Place of publication
Brno
Event location
Brno
Event date
Jun 28, 2012
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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