Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F15%3APU113252" target="_blank" >RIV/00216305:26220/15:PU113252 - isvavai.cz</a>

Result on the web

<a href="http://dx.doi.org/10.1515/msp-2015-0036" target="_blank" >http://dx.doi.org/10.1515/msp-2015-0036</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1515/msp-2015-0036" target="_blank" >10.1515/msp-2015-0036</a>

Result language

angličtina

Original language name

Morphological features in aluminum nitride epilayers prepared by magnetron sputtering

Original language description

The aim of this study is to characterize the surface topography of aluminum nitride (AlN) epilayers prepared by magnetron sputtering using the surface statistical parameters, according to ISO 25178-2:2012. To understand the effect of temperature on the epilayer structure, the surface topography was investigated through atomic force microscopy (AFM). AFM data and analysis of surface statistical parameters indicated the dependence of morphology of the epilayers on their growth conditions. The surface statistical parameters provide important information about surface texture and are useful for manufacturers in developing AlN thin films with improved surface characteristics. These results are also important for understanding the nanoscale phenomena at the contacts between rough surfaces, such as the area of contact, the interfacial separation, and the adhesive and frictional properties

Czech name

—

Czech description

—

Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

—

OECD FORD branch

20201 - Electrical and electronic engineering

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Publication year

2015

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

MATERIALS SCIENCE-POLAND

ISSN

0137-1339

e-ISSN

—

Volume of the periodical

33

Issue of the periodical within the volume

1

Country of publishing house

PL - POLAND

Number of pages

10

Pages from-to

175-184

UT code for WoS article

000352510200025

EID of the result in the Scopus database

2-s2.0-84929460598