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Micromorphology of AlN Epilayers on Sapphire Substrates

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F17%3APU125080" target="_blank" >RIV/00216305:26220/17:PU125080 - isvavai.cz</a>

  • Result on the web

    <a href="http://dpi-proceedings.com/index.php/dtcse/issue/view/157" target="_blank" >http://dpi-proceedings.com/index.php/dtcse/issue/view/157</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.12783/dtcse/cece2017/14582" target="_blank" >10.12783/dtcse/cece2017/14582</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Micromorphology of AlN Epilayers on Sapphire Substrates

  • Original language description

    The purpose of this paper was to describe the 3D nano-scaled surface topography of the aluminum nitride on sapphire. The structures were prepared by magnetron sputtering with heating of the sapphire substrate. The dependence of the layers topography on the substrate temperature was presented. Surface appearance was studied by atomic force microscopy (AFM). The quantitative topography data from AFM were used for surface characterization by fractal analysis and statistical parameters. The results of fractal analysis show the correlation of fractal dimension and statistical characteristics of surface topography. The data may contribute to manufacture of AlN thin films with desired surface characteristics.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

  • OECD FORD branch

    20201 - Electrical and electronic engineering

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2017

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    DEStech Transactions on Computer Science and Engineering

  • ISBN

    978-1-60595-476-9

  • ISSN

    2475-8841

  • e-ISSN

  • Number of pages

    6

  • Pages from-to

    465-470

  • Publisher name

    DEStech Publications, Inc.

  • Place of publication

    439 North Duke Street Lancaster, Pennsylvania 1

  • Event location

    Sanya

  • Event date

    Jun 25, 2017

  • Type of event by nationality

    WRD - Celosvětová akce

  • UT code for WoS article