Investigation of structure of AlN thin films using Fourier-transform infrared spectroscopy
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F20%3APU135587" target="_blank" >RIV/00216305:26220/20:PU135587 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S2452321620302195" target="_blank" >https://www.sciencedirect.com/science/article/pii/S2452321620302195</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.prostr.2020.01.152" target="_blank" >10.1016/j.prostr.2020.01.152</a>
Alternative languages
Result language
angličtina
Original language name
Investigation of structure of AlN thin films using Fourier-transform infrared spectroscopy
Original language description
This study focuses on structural imperfections caused by hydrogen impurities in AlN thin films obtained using atomic layer deposition method (ALD). Currently, there is a severe lack of studies regarding the presence of hydrogen in the bulk of AlN films. Fourier-transform infrared spectroscopy (FTIR) is one of the few methods that allow detection bonds of light elements, in particular - hydrogen. Hydrogen is known to be a frequent contaminant in AlN films grown by ALD method, it may form different bonds with nitrogen, e.g. amino (–NH2) or imide (–NH) groups, which impair the quality of the resulting film. Which is why, it is important to investigate the phenomenon of hydrogen as well as to search for the suitable methods to eliminate or at least reduce its quantity. In this work several samples have been prepared using different precursors, substrates and deposition parameters and characterized using FTIR and additional techniques such as AFM, XPS and EDS to provide a comparative and comprehensive analysis of topography, morphology and chemical composition of AlN thin films.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Procedia Structural Integrity
ISBN
978-80-214-5760-7
ISSN
2452-3216
e-ISSN
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Number of pages
6
Pages from-to
601-606
Publisher name
Elsevier
Place of publication
Neuveden
Event location
Brno
Event date
Jun 26, 2019
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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