Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F21%3APU141413" target="_blank" >RIV/00216305:26220/21:PU141413 - isvavai.cz</a>
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0042207X21004826?via%3Dihub" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0042207X21004826?via%3Dihub</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2021.110533" target="_blank" >10.1016/j.vacuum.2021.110533</a>

Result language
angličtina
Original language name
Investigation of hydrogen impurities in PE-ALD AlN thin films by IBA methods
Original language description
Hydrogen impregnation is one of the main sources of contamination in AlN thin films obtained by atomic layer deposition method (ALD) as many studies report. Such impurities can be potentially detrimental to mechanical and electrical properties of the material. In this study methods belonging to ion-beam analysis (IBA) group, namely: elastic recoil detection analysis (ERDA), nuclear reaction analysis (NRA) and secondary-ion mass spectrometry (SIMS) were utilized to examine AlN thin films obtained by plasma-enhanced atomic layer deposition (PE-ALD) with use of trimethylaluminium (TMA) and N2+H2 gas mixture as precursors. Several depositions of AlN layers were carried out with different values of N2+H2 flux intensity (20, 100, 150 sccm) and TMA pulse (0.06, 0.12, 0.15 s) in order to investigate whether such alterations would produce any effect on the resulting films. Data obtained within the scope of this study suggest that AlN grown by PE-ALD exhibit rather low amounts of hydrogen impurities, especially when compared to thermal ALD. Furthermore, the effect of high-temperature treatment in N2 atmosphere was studied and was found out to produce a positive effect on the chemical composition of AlN films.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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