STRUCTURAL CHARACHTERIZATION OF ALN THIN FILMS OBTAINED ON SILICON SURFACE BY PE-ALD
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F20%3APU137295" target="_blank" >RIV/00216305:26220/20:PU137295 - isvavai.cz</a>
Result on the web
<a href="https://www.fekt.vut.cz/conf/EEICT/archiv/sborniky/EEICT_2020_sbornik_2.pdf" target="_blank" >https://www.fekt.vut.cz/conf/EEICT/archiv/sborniky/EEICT_2020_sbornik_2.pdf</a>
DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
STRUCTURAL CHARACHTERIZATION OF ALN THIN FILMS OBTAINED ON SILICON SURFACE BY PE-ALD
Original language description
The aim of this study is to investigate the hydrogen impregnations in AlN thin films deposited using plasma-enhanced atomic layer deposition technique. As of date, there is an apparent gap in the literature regarding the matter of hydrogen impregnation within the AlN layers. Hydrogen is a frequent contaminant and its content has detrimental effect on the quality of resulted layer, which is why it is relevant to investigate this particular contaminant and try to eliminate or at least minimize its quantity. Within the films hydrogen commonly forms amino or imide types of bonds (–NH 2 , -NH). There is only a handful of analytical methods enabling the detection of hydrogen. This particular study comprises two of them – Fourier-transform infrared spectroscopy (FTIR) and second ion-mass spectrometry (SIMS). XPS analysis has also been included to examine the surface nature and structural imperfections of the grown layer.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
<a href="/en/project/LM2018110" target="_blank" >LM2018110: CzechNanoLab research infrastructure</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>S - Specificky vyzkum na vysokych skolach
Others
Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of the 26th Conference STUDENT EEICT 2020
ISBN
978-80-214-5868-0
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
197-202
Publisher name
Neuveden
Place of publication
neuveden
Event location
BRNO
Event date
Apr 23, 2020
Type of event by nationality
CST - Celostátní akce
UT code for WoS article
000598376500045