Numerical Analysis of ECR Plasma Source
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F21%3APU146189" target="_blank" >RIV/00216305:26220/21:PU146189 - isvavai.cz</a>
Result on the web
<a href="https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9694836" target="_blank" >https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9694836</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/PIERS53385.2021.9694836" target="_blank" >10.1109/PIERS53385.2021.9694836</a>
Alternative languages
Result language
angličtina
Original language name
Numerical Analysis of ECR Plasma Source
Original language description
Gases ionizers usage ECR (Electron Cyclotron Resonance) is one of the methods for creating two temperature plasma. Thanks to high efficiency is this method suitable for wide spectrum of applications. Especially for the systems which are sensitives on high power electrical noise, cooling is problematic for them or they have limited power supplier (electron microscopy, plasma actuators, etc.). The main disadvantage of ECR plasma sources is complicated design compared to the other ionisation techniques. The crucial is tune of the magnetostatics and high frequency fields in active area of the source. Working frequency also plays an important role and even electric and magnetic field ratio. This paper describes how to calculate electric and magnetic fields inside ECR plasma sources and how to enable tune and optimization of these sources. Paper also shows how to make visualisation of the active ECR surfaces and thereby deepening the understanding of how the sources works.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
20200 - Electrical engineering, Electronic engineering, Information engineering
Result continuities
Project
—
Continuities
S - Specificky vyzkum na vysokych skolach
Others
Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
2021 Photonics & Electromagnetics Research Symposium (PIERS)
ISBN
978-1-7281-7247-7
ISSN
1559-9450
e-ISSN
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Number of pages
4
Pages from-to
419-422
Publisher name
IEEE
Place of publication
NEW YORK
Event location
Hangzhou, China
Event date
Nov 21, 2021
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000795902300064