Dynamic study of dual high-power impulse magnetron sputtering discharge by optical emission imaging

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68378271%3A_____%2F11%3A00373838" target="_blank" >RIV/68378271:_____/11:00373838 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1109/TPS.2011.2155674" target="_blank" >http://dx.doi.org/10.1109/TPS.2011.2155674</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/TPS.2011.2155674" target="_blank" >10.1109/TPS.2011.2155674</a>

Result language
angličtina
Original language name
Dynamic study of dual high-power impulse magnetron sputtering discharge by optical emission imaging
Original language description
Fast optical emission imaging was employed for dynamic study of dual-high-power impulse magnetron sputtering discharge. The sputtering sources were equipped with reversed polarity of magnets, i.e., so-called closed magnetic field between magnetrons. Plasma is confined in closed magnetic field between targets alternately employed as cathode/anode. This type of magnetic confinement affects the transport of electrons and also the ionization processes of neutral particles present in the plasma, as will be shown in this paper.
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BH - Optics, masers and lasers
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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