High aspect ratio Parylene C micropillars formed by molding and ION-BEAM etching method
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F22%3APU145112" target="_blank" >RIV/00216305:26220/22:PU145112 - isvavai.cz</a>
Result on the web
<a href="https://www.confer.cz/nanocon/2021/4349-high-aspect-ratio-parylene-c-micropillars-for-cellular-force-measurement" target="_blank" >https://www.confer.cz/nanocon/2021/4349-high-aspect-ratio-parylene-c-micropillars-for-cellular-force-measurement</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2021.4349" target="_blank" >10.37904/nanocon.2021.4349</a>
Alternative languages
Result language
angličtina
Original language name
High aspect ratio Parylene C micropillars formed by molding and ION-BEAM etching method
Original language description
This paper represents the molding and plasma etching method for developing a high aspect ratio parylene C pillar array. The silicon mold was fabricated using the modified Bosch process. The parylene was deposited by chemical vapor deposition into the silicone holes, followed by the etching of silicon to obtain the transparent membrane of hollow parylene C pillars. The etching method was initialized by transferring the pattern on the hard titanium mask via standard photolithography, followed by titanium etching. The oxygen plasma ion-milling of parylene C produced the flexible pillars standing on the silicon substrate. Both pillar arrays were characterized by scanning electron microscopy. Arrays of micropillars could be applicable for measuring cellular forces or as the bioinspired platform with modulated surface chemistry.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
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OECD FORD branch
21001 - Nano-materials (production and properties)
Result continuities
Project
<a href="/en/project/GJ19-04270Y" target="_blank" >GJ19-04270Y: Real-time mapping of cellular traction forces</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
NANOCON Conference Proceedings - International Conference on Nanomaterials
ISBN
9788088365006
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
1-4
Publisher name
TANGER
Place of publication
neuveden
Event location
Brno
Event date
Oct 20, 2021
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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