Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F18%3APU128518" target="_blank" >RIV/00216305:26620/18:PU128518 - isvavai.cz</a>

Result on the web

<a href="https://link.springer.com/article/10.1007/s10404-018-2125-6" target="_blank" >https://link.springer.com/article/10.1007/s10404-018-2125-6</a>

DOI - Digital Object Identifier

<a href="http://dx.doi.org/10.1007/s10404-018-2125-6" target="_blank" >10.1007/s10404-018-2125-6</a>

Result language

angličtina

Original language name

Fabrication of buried microfluidic channels with observation windows using femtosecond laser photoablation and parylene-C coating

Original language description

We developed an advanced method for fabricating microfluidic structures comprising channels and inputs/outputs buried within a silicon wafer based on single level lithography. We etched trenches into a silicon substrate, covered these trenches with parylene-C, and selectively opened their bottoms using femtosecond laser photoablation, forming channels and inputs/outputs by isotropic etching of silicon by xenon difluoride vapors. We subsequently sealed the channels with a second parylene-C layer. Unlike in previously published works, this entire process is conducted at ambient temperature to allow for integration with complementary metal oxide semiconductor devices for smart readout electronics. We also demonstrated a method of chip cryo-cleaving with parylene presence that allows for monitoring of the process development. We also created an observation window for in situ visualization inside the opaque silicon substrate by forming a hole in the parylene layer at the silicon backside and with local silicon removal by xenon difluoride vapor etching. We verified the microfluidic chip performance by forming a segmented flow of a fluorescein solution in an oil stream. This proposed technique provides opportunities for forming simple microfluidic systems with buried channels at ambient temperature.

Czech name

—

Czech description

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Type

J_imp - Article in a specialist periodical, which is included in the Web of Science database

CEP classification

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OECD FORD branch

10305 - Fluids and plasma physics (including surface physics)

Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

Microfluidics and Nanofluidics

ISSN

1613-4982

e-ISSN

1613-4990

Volume of the periodical

22

Issue of the periodical within the volume

9

Country of publishing house

DE - GERMANY

Number of pages

7

Pages from-to

1-7

UT code for WoS article

000443569300001

EID of the result in the Scopus database

2-s2.0-85052760399