Position Sensing of Electrostatic MEMS Actuator

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F22%3APU146754" target="_blank" >RIV/00216305:26220/22:PU146754 - isvavai.cz</a>
Alternative codes found
RIV/60162694:G43__/23:00558438
Result on the web
<a href="https://ieeexplore.ieee.org/document/9971110" target="_blank" >https://ieeexplore.ieee.org/document/9971110</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1109/ICECS202256217.2022.9971110" target="_blank" >10.1109/ICECS202256217.2022.9971110</a>

Result language
angličtina
Original language name
Position Sensing of Electrostatic MEMS Actuator
Original language description
The paper deals with a sensing technique for electrostatic MEMS (Micro-Electro-Mechanical Systems) actuator with an associated mechanical system. The weight of the load and the torsional elasticity form a mechanical resonant system with a relatively high quality factor, which is prone to parasitic oscillations. The paper studies a damping feedback loop with an all-electrical sensing of the drive angular position. The sensing bridge works with any comb drive not requiring dedicated fingers to sense the position. An experimental realization of the loop with dual-axis mirror drive is presented.
Czech name
—
Czech description
—

Project
<a href="/en/project/VI20192022173" target="_blank" >VI20192022173: Robust System of Optical Wireless Communication</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2022
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
2022 29th IEEE International Conference on Electronics, Circuits and Systems (ICECS 2022)
ISBN
9781665488235
ISSN
—
e-ISSN
—
Number of pages
4
Pages from-to
„“-„“
Publisher name
IEEE
Place of publication
Glasgow, United Kingdom
Event location
Glasgow
Event date
Oct 24, 2022
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
000913346300219

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