Dependence of the 6H - SiC induced amorphization on the ion beam implanted fluence

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26220%2F23%3APU148616" target="_blank" >RIV/00216305:26220/23:PU148616 - isvavai.cz</a>
Result on the web
<a href="https://pubs.aip.org/aip/acp/article/2778/1/060002/2888698/" target="_blank" >https://pubs.aip.org/aip/acp/article/2778/1/060002/2888698/</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/5.0136670" target="_blank" >10.1063/5.0136670</a>

Result language
angličtina
Original language name
Dependence of the 6H - SiC induced amorphization on the ion beam implanted fluence
Original language description
The 6H-SiC samples have been implanted by 4 MeV C and Si ions in the (0001) channeling direction to the sets of multiple implantation fluences. These samples were analyzed via Elastic Backscattering Spectroscopy in the channeling mode (EBS/C) using 1.725 MeV proton beam, from which SiC amorphization depth profiles and averaged integral 6H-SiC amorphization have been obtained. The averaged integral 6H-SiC crystal amorphization vs implanted fluence dependence has been determined for both types of implanted ions. From these dependences, the 6H-SiC integral crystal amorphization vs. implanted fluence/type of implanted atom assessment model have been proposed.
Czech name
—
Czech description
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2023
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
AIP Conference Proceedings 2778 - 27th Conference on Applied Physics of Condensed Matter (APCOM 2022)
ISBN
978-0-7354-4479-9
ISSN
0094-243X
e-ISSN
—
Number of pages
5
Pages from-to
1-5
Publisher name
American Institute of Physics Inc.
Place of publication
AIP College Park, Maryland, USA Physical Science
Event location
Štrbské Pleso, Slovakia
Event date
Jun 22, 2022
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
001055613400055

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