Burning conditions of nonthermal Ar plasma at continuous and pulsed mode

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F06%3APU58862" target="_blank" >RIV/00216305:26310/06:PU58862 - isvavai.cz</a>
Result on the web
—
DOI - Digital Object Identifier
—

Result language
angličtina
Original language name
Burning conditions of nonthermal Ar plasma at continuous and pulsed mode
Original language description
A new capacitively coupling system has been developed for the plasma treatment and coating of planar substrates. The system with a bottom rotary electrode and an up- per grounded shower type electrode can be evacuated to the basic vacuum of 10-6 Pa usinga turbomolecular pump. A side load lock can be used to feed the bottom electrode by six substrates double-side polished silicon wafer 10x10x0.6mm3) using a magnetic drive. The reactor was equipped by an RF power supply of 1 000W (13.56 MHz) operated in continuous and pulsed mode. The distance between both the electrodes can be posi- tioned from 20mm to 60 mm. Discharge conditions of Ar plasma have been determined with respect to the argon Flow-rate (2 - 50 sccm), pressure (0:5 - 50Pa) and RF power of continuous (1 - 300W) and pulsed (0:1 - 300W) mode for two distances of the elec- trodes (30 and 60 mm). Processing chart pressure vs. power has been constructed in order to found out conditions for stable Ar{plasma. The stability of glow d
Czech name
Podmínky v nizkoteplotním Argonovém plazmatu v kontinuálním a pulzním módu.
Czech description
Srovnání podmínek pulzního a kontinuálního režimu v argonovém plazmatu, závislost self bias vs. tlak, průtok Ar, vzdálenosdt elektrod, výkon a pod.

Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
—

Project
<a href="/en/project/GP104%2F04%2FP138" target="_blank" >GP104/04/P138: Preparation of plasma polymer films with controlled mechanical properties</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2006
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Similar results(10)