Nanoindentation measurements of plasma polymer films

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F07%3APU70625" target="_blank" >RIV/00216305:26310/07:PU70625 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Nanoindentation measurements of plasma polymer films

Original language description

Mechanical properties of thin films deposited from a mixture of tetravinylsilane vapor and oxygen gas by plasma-enhanced chemical vapor deposition were investigated using nanoindentaion. The Young's modulus and hardness of the film increased with enhanced RF power while a significant rise of oxygen concentration in the film resulted in descent of mechanical constants.

Czech name

Nanoindentační měření vrstev plazmových polymerů

Czech description

Nanoindentační měření vrstev plazmových polymerů

Type

D - Article in proceedings

CEP classification

CF - Physical chemistry and theoretical chemistry

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Publication year

2007

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection

18th International Symposium on Plasma Chemistry

ISBN

978-4-9903773-2-8

ISSN

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e-ISSN

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Number of pages

4

Pages from-to

1-4

Publisher name

Neuveden

Place of publication

Neuveden

Event location

Kjoto

Event date

Aug 26, 2007

Type of event by nationality

WRD - Celosvětová akce

UT code for WoS article

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