Physical versus chemical properties of plasma-polymerized a-SiOC:H films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F07%3APU70627" target="_blank" >RIV/00216305:26310/07:PU70627 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Physical versus chemical properties of plasma-polymerized a-SiOC:H films
Original language description
Plasma-polymerized a-SiOC:H films were deposited from a mixture of tetravinylsilane vapor and oxygen gas at different power (0.1-10 W) and oxygen-to-total flow rate ratio (0-0.79). The Young's modulus, hardness, refractive index, extinction coefficient,and band gap of the plasma polymer were found to be controlled by the ratio between the content of carbon and oxygen atoms in films.
Czech name
Fyzikální vs. chemické vlastnosti a-SiOC:H vrstev
Czech description
Fyzikální vs. chemické vlastnosti a-SiOC:H vrstev
Classification
Type
D - Article in proceedings
CEP classification
CF - Physical chemistry and theoretical chemistry
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
18th International Symposium on Plasma Chemistry
ISBN
978-4-9903773-2-8
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
1-4
Publisher name
Neuveden
Place of publication
Neuveden
Event location
Kjoto
Event date
Aug 26, 2007
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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