Thickness measurement of thin soft organic films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F12%3APU103402" target="_blank" >RIV/00216305:26310/12:PU103402 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Thickness measurement of thin soft organic films
Original language description
This paper compares chromatic white light (CWL) and interference microscope measurements aiming to find a proper non-contact method for a thickness determination of thin soft organic films. Standard samples with vacuum deposited aluminum films of different thicknesses in the range of 50-1000 nm were prepared and measured by both methods. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of themethod 2D and 3D surface morphology imaging of the films could be recorded and the surface film roughness could be calculated. In a case of optical inhomogeneity the method requires covering with a uniform high reflective coating. The interference microscopy method results in a relatively lower film thickness with a higher standard deviation and a higher standard relative error. It could be connected with the resolution of the interferograms measured.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
CF - Physical chemistry and theoretical chemistry
OECD FORD branch
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Result continuities
Project
<a href="/en/project/ED0012%2F01%2F01" target="_blank" >ED0012/01/01: Centres for materials research at FCH BUT</a><br>
Continuities
O - Projekt operacniho programu
Others
Publication year
2012
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Electronics Technology (ISSE), 2012 35th International Spring Seminar on
ISBN
978-1-4673-2241-6
ISSN
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e-ISSN
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Number of pages
6
Pages from-to
367-372
Publisher name
Neuveden
Place of publication
Bad Aussee, Austria
Event location
Bad Aussee
Event date
May 9, 2012
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
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