Film thickness measurement by optical profilometer MicroProf FRTMicroProf FRT

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F13%3APU105708" target="_blank" >RIV/00216305:26310/13:PU105708 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Film thickness measurement by optical profilometer MicroProf FRTMicroProf FRT

Original language description

This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.

Czech name

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Czech description

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Type

J_x - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)

CEP classification

CF - Physical chemistry and theoretical chemistry

OECD FORD branch

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Project

Result was created during the realization of more than one project. More information in the Projects tab.

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2013

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Name of the periodical

BULGARIAN CHEMICAL COMMUNICATIONS

ISSN

0324-1130

e-ISSN

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Volume of the periodical

45

Issue of the periodical within the volume

B

Country of publishing house

BG - BULGARIA

Number of pages

4

Pages from-to

194-197

UT code for WoS article

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EID of the result in the Scopus database

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