Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26310%2F13%3APU105705" target="_blank" >RIV/00216305:26310/13:PU105705 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Film Thickness Measurement and Surface Characterization by Optical Profilometer MicroProf FRT
Original language description
This paper compares Chromatic White Light (CWL) and stylus profilometer measurements in an attempt to determine the capabilities of the non-contact CWL method for thickness measurements of thin soft organic films. It was found that the CWL technique is proper for a measurement of thin soft organic films with higher than 40-50 nm film thicknesses. As a complementary feature of the method 2D and 3D surface morphology imaging of the films were recorded and processed by digital calculations and Fourier filtering.
Czech name
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Czech description
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Classification
Type
O - Miscellaneous
CEP classification
CF - Physical chemistry and theoretical chemistry
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2013
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů