Optimization of ion-atomic beam source for deposition of GaN ultrathin films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F14%3APU110024" target="_blank" >RIV/00216305:26620/14:PU110024 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.1063/1.4892800" target="_blank" >http://dx.doi.org/10.1063/1.4892800</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1063/1.4892800" target="_blank" >10.1063/1.4892800</a>
Alternative languages
Result language
angličtina
Original language name
Optimization of ion-atomic beam source for deposition of GaN ultrathin films
Original language description
We describe the optimization and application of an ion-atomic beam source for ion-beam-assisted deposition of ultrathin films in ultrahigh vacuum. The device combines an effusion cell and electronimpact ion beam source to produce ultra-low energy (20–200 eV) ion beams and thermal atomic beams simultaneously. The source was equipped with a focusing system of electrostatic electrodes increasing the maximum nitrogen ion current density in the beam of a diameter of 15 mm by one order of magnitude (j 1000 nA/cm2). Hence, a successful growth of GaN ultrathin films on Si(111) 7 x 7 substrate surfaces at reasonable times and temperatures significantly lower (RT, 300 C) than in conventional metalorganic chemical vapor deposition technologies (1000 C) was achieved. The chemical composition of these films was characterized in situ by X-ray Photoelectron Spectroscopy and morphology ex situ using Scanning Electron Microscopy. It has been shown that the morphology of GaN layers strongly depends on the relative Ga-N bond concentration in the layers.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
Review of Scientific Instruments
ISSN
0034-6748
e-ISSN
1089-7623
Volume of the periodical
85
Issue of the periodical within the volume
8
Country of publishing house
US - UNITED STATES
Number of pages
5
Pages from-to
„083302-1“-„083302-5“
UT code for WoS article
000342913500019
EID of the result in the Scopus database
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