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Optimization of ion-atomic beam source for deposition of GaN ultrathin films

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F14%3APU110024" target="_blank" >RIV/00216305:26620/14:PU110024 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1063/1.4892800" target="_blank" >http://dx.doi.org/10.1063/1.4892800</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1063/1.4892800" target="_blank" >10.1063/1.4892800</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Optimization of ion-atomic beam source for deposition of GaN ultrathin films

  • Original language description

    We describe the optimization and application of an ion-atomic beam source for ion-beam-assisted deposition of ultrathin films in ultrahigh vacuum. The device combines an effusion cell and electronimpact ion beam source to produce ultra-low energy (20–200 eV) ion beams and thermal atomic beams simultaneously. The source was equipped with a focusing system of electrostatic electrodes increasing the maximum nitrogen ion current density in the beam of a diameter of 15 mm by one order of magnitude (j 1000 nA/cm2). Hence, a successful growth of GaN ultrathin films on Si(111) 7 x 7 substrate surfaces at reasonable times and temperatures significantly lower (RT, 300 C) than in conventional metalorganic chemical vapor deposition technologies (1000 C) was achieved. The chemical composition of these films was characterized in situ by X-ray Photoelectron Spectroscopy and morphology ex situ using Scanning Electron Microscopy. It has been shown that the morphology of GaN layers strongly depends on the relative Ga-N bond concentration in the layers.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2014

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Review of Scientific Instruments

  • ISSN

    0034-6748

  • e-ISSN

    1089-7623

  • Volume of the periodical

    85

  • Issue of the periodical within the volume

    8

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    5

  • Pages from-to

    „083302-1“-„083302-5“

  • UT code for WoS article

    000342913500019

  • EID of the result in the Scopus database