Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F14%3APU111634" target="_blank" >RIV/00216305:26620/14:PU111634 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Fast response hydrogen microsensor based on semiconductor niobium-oxide nanostructures via smart anodizing of Al/Nb metal layers
Original language description
Nanostructured niobium oxide semiconductor is gaining increasing attention as electro-optic and gas sensing material. However, the preparation of stable niobium oxide nanofilm with reproducible morphology and behaviour remains a challenge. Here we describe a rapid and well-controlled approach to synthesize a niobium oxide film with the columnlike nanostructured morphology via anodic processing of Al/Nb metal layers sputtered onto an oxide-coated Si wafer. The film is developed due to the growth of a nanoporous anodic alumina layer followed by pore-directed oxidation of the Nb underlayer. The post-anodizing treatment results in the controlled formation of Nb2O5 crystal phase, which causes the transformation from dielectric to n-type semiconductor behavior of the film. A laboratory gas sensor fabricated by uniting the anodizing approach developed here with standard micromachining technologies shows superior characteristics for hydrogen gas detection, the response-recovery time being among best ever reported
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
JB - Sensors, detecting elements, measurement and regulation
OECD FORD branch
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Result continuities
Project
<a href="/en/project/GA14-29531S" target="_blank" >GA14-29531S: Formation and properties of novel self-organized mixed-oxide 3-D nanostructured films for use in advanced microdevices (AnoNanoFilm)</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2014
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
SOLID-STATE TRANSDUCERS. EUROPEAN CONFERENCE. 28TH 2014. (EUROSENSORS 2014)
ISBN
978-1-5108-0586-6
ISSN
1877-7058
e-ISSN
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Number of pages
4
Pages from-to
811-814
Publisher name
Elsevier Ltd.
Place of publication
Netherlands
Event location
Brescia
Event date
Sep 7, 2014
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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