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Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithography

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F16%3APU121164" target="_blank" >RIV/00216305:26620/16:PU121164 - isvavai.cz</a>

  • Result on the web

    <a href="http://dx.doi.org/10.1116/1.4966959" target="_blank" >http://dx.doi.org/10.1116/1.4966959</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1116/1.4966959" target="_blank" >10.1116/1.4966959</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Patterning large area plasmonic nanostructures on nonconductive substrates using variable pressure electron beam lithography

  • Original language description

    Variable pressure electron beam lithography (VP-EBL) is a unique technique offering alternative cost-effective approach for patterning on nonconductive substrates that are often required for many applications in the field of plasmonics. Here, the authors present the use of the VP-EBL for accurate fabrication of nanoantennas with plasmonic resonances in visible range in order to achieve artificial sample coloring. Using confocal transmission spectroscopy, the authors show that optimized VP-EBL process enables fabrication of plasmonic nanoantennas with optical properties equivalent to those produced via traditional approach. Furthermore, the authors demonstrate high stability of the exposure process by fabricating a millimeter-sized color image composed of plasmonic nanoantennas.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2016

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

  • ISSN

    1071-1023

  • e-ISSN

  • Volume of the periodical

    34

  • Issue of the periodical within the volume

    6

  • Country of publishing house

    US - UNITED STATES

  • Number of pages

    4

  • Pages from-to

    „ 06K801-1“-„ 06K801-4“

  • UT code for WoS article

    000389530000024

  • EID of the result in the Scopus database

    2-s2.0-84994728096