Integration of one-dimensional gas sensitive nanostructures grown via chemical vapour deposition into microdevices

Result code in IS VaVaI

<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F18%3APU129847" target="_blank" >RIV/00216305:26620/18:PU129847 - isvavai.cz</a>

Result on the web

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DOI - Digital Object Identifier

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Result language

angličtina

Original language name

Integration of one-dimensional gas sensitive nanostructures grown via chemical vapour deposition into microdevices

Original language description

Nanostructures (NS), e.g., based on metal oxides, are attractive in gas sensors because they proved to enhance their functionality, providing better sensitivity, stability, and selectivity. Further enhancement of the functionality of nanostructures is also known to be achieved by electronic and/or chemical sensitization via the surface modification with second-phase materials (e.g., catalytic nanoparticles with sizes less than 10 nm). The formation of NSs is traditionally achieved via liquid- or vapour-phase routes, with the vapour-phase routes (e.g., CVD) having shown advantages that include greater purity, the ability to generate NSs in continuous rather than batch mode and higher throughputs. This is crucial for developing a low cost manufacturing method of gas sensing devices that may be adequate for high volume Smart System Solutions. Thus, in this work, the use of CVD and aerosol assisted (AA) CVD to synthesize non-modified and modified NSs is proposed.

Czech name

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Czech description

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Type

O - Miscellaneous

CEP classification

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OECD FORD branch

21002 - Nano-processes (applications on nano-scale); (biomaterials to be 2.9)

Project

<a href="/en/project/GA17-16531S" target="_blank" >GA17-16531S: SURFACE MODIFIED NANOWIRES FOR SELECTIVE DETECTION OF VOLATILE ORGANIC COMPOUNDS (NoWSens)</a><br>

Continuities

P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year

2018

Confidentiality

S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů