LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F19%3APU147226" target="_blank" >RIV/00216305:26620/19:PU147226 - isvavai.cz</a>
Result on the web
<a href="http://dx.doi.org/10.37904/nanocon.2019.8655" target="_blank" >http://dx.doi.org/10.37904/nanocon.2019.8655</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.37904/nanocon.2019.8655" target="_blank" >10.37904/nanocon.2019.8655</a>
Alternative languages
Result language
angličtina
Original language name
LITESCOPE (TM) AFM-IN-SEM: ADVANCED TOOL FOR CORRELATIVE IMAGING AND SURFACE CHARACTERIZATION
Original language description
Atomic force microscope (AFM) LiteScope (TM) produced by NenoVision is carefully designed for direct integration into many different types of scanning electron microscopes (SEM). It is equipped with unique technology for true correlative imaging - Correlative Probe and Electron Microscopy (TM) (CPEM). It allows simultaneous measurement of various signals of SEM, AFM and other related techniques like Electron Beam Induced Current (EBIC) or Catodoluminiscence (CL). LiteScope also enables using other methods such as Focused Ion Beam (FIB), Gas Injection System (GIS) or Electron Dispersive X-ray (EDX) to modify and right away analyze the sample surface. Among the main applications belong e.g. 3D surface characterization, height/depth profiling, surface roughness calculation, precise tip navigation, nanoindentation and nanomanipulation, variety of spectroscopic regimes, measurement of electrical and mechanical sample properties, etc.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
—
OECD FORD branch
21001 - Nano-materials (production and properties)
Result continuities
Project
—
Continuities
I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace
Others
Publication year
2019
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
11TH INTERNATIONAL CONFERENCE ON NANOMATERIALS - RESEARCH & APPLICATION (NANOCON 2019)
ISBN
978-80-87294-95-6
ISSN
2694-930X
e-ISSN
—
Number of pages
5
Pages from-to
568-572
Publisher name
TANGER LTD
Place of publication
SLEZSKA
Event location
Brno
Event date
Oct 16, 2019
Type of event by nationality
EUR - Evropská akce
UT code for WoS article
000664115400097