AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F20%3APU136563" target="_blank" >RIV/00216305:26620/20:PU136563 - isvavai.cz</a>
Result on the web
<a href="https://doi.org/10.1017/S1551929520000875" target="_blank" >https://doi.org/10.1017/S1551929520000875</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1017/S1551929520000875" target="_blank" >10.1017/S1551929520000875</a>

Result language
angličtina
Original language name
AFM-in-SEM as a Tool for Comprehensive Sample Surface Analysis
Original language description
Key features and applications of a unique atomic force microscope (AFM), the LiteScope™, which can be integrated into a scanning electron microscope (SEM) is reported. Using the AFM-in-SEM as one tool combines the capabilities of both systems in a very efficient way. The LiteScope design features advanced Correlative Probe and Electron Microscopy (CPEM)™ imaging technology that allows simultaneous acquisition of multiple AFM and SEM signals and their precise in-time correlation into a 3D CPEM view. AFM-in-SEM advantages are presented using several examples of applications and AFM measurement modes including CPEM, material electrical and mechanical properties together with nanoindentation, and focused ion beam (FIB) applications.
Czech name
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Czech description
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Type
J<sub>ost</sub> - Miscellaneous article in a specialist periodical
CEP classification
—
OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
<a href="/en/project/TJ01000434" target="_blank" >TJ01000434: Development of SPM applications suitable for correlative microscopy</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2020
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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