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Beam shaping and probe characterization in the scanning electron microscope

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F00216305%3A26620%2F21%3APU140679" target="_blank" >RIV/00216305:26620/21:PU140679 - isvavai.cz</a>

  • Alternative codes found

    RIV/68081731:_____/21:00543063

  • Result on the web

    <a href="https://doi.org/10.1016/j.ultramic.2021.113268" target="_blank" >https://doi.org/10.1016/j.ultramic.2021.113268</a>

  • DOI - Digital Object Identifier

    <a href="http://dx.doi.org/10.1016/j.ultramic.2021.113268" target="_blank" >10.1016/j.ultramic.2021.113268</a>

Alternative languages

  • Result language

    angličtina

  • Original language name

    Beam shaping and probe characterization in the scanning electron microscope

  • Original language description

    Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.

  • Czech name

  • Czech description

Classification

  • Type

    J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database

  • CEP classification

  • OECD FORD branch

    10306 - Optics (including laser optics and quantum optics)

Result continuities

  • Project

    Result was created during the realization of more than one project. More information in the Projects tab.

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Others

  • Publication year

    2021

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Name of the periodical

    Ultramicroscopy

  • ISSN

    0304-3991

  • e-ISSN

    1879-2723

  • Volume of the periodical

    225

  • Issue of the periodical within the volume

    1

  • Country of publishing house

    NL - THE KINGDOM OF THE NETHERLANDS

  • Number of pages

    9

  • Pages from-to

    1-9

  • UT code for WoS article

    000649633800002

  • EID of the result in the Scopus database

    2-s2.0-85104406836