Beam shaping and probe characterization in the scanning electron microscope

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F68081731%3A_____%2F21%3A00543063" target="_blank" >RIV/68081731:_____/21:00543063 - isvavai.cz</a>
Alternative codes found
RIV/00216305:26620/21:PU140679
Result on the web
<a href="https://www.sciencedirect.com/science/article/pii/S0304399121000589" target="_blank" >https://www.sciencedirect.com/science/article/pii/S0304399121000589</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.ultramic.2021.113268" target="_blank" >10.1016/j.ultramic.2021.113268</a>

Result language
angličtina
Original language name
Beam shaping and probe characterization in the scanning electron microscope
Original language description
Here we demonstrate the use of nanofabricated grating holograms to diffract and shape electrons in a scanning electron microscope. The diffraction grating is placed in an aperture in the column. The entire diffraction pattern can be passed through the objective lens and projected onto the specimen, or an intermediate aperture can be used to select particular diffracted beams. We discuss several techniques for characterizing the diffraction pattern. The grating designs can incorporate features that can influence the phase and intensity of the diffracted SEM probe. We demonstrate this by producing electron vortex beams.
Czech name
—
Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10303 - Particles and field physics

Project
<a href="/en/project/TN01000008" target="_blank" >TN01000008: Center of electron and photonic optics</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2021
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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