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Atomic force microscopy study of SnO2 thin films for gas sensor

The result's identifiers

  • Result code in IS VaVaI

    <a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F02%3A00001972" target="_blank" >RIV/44555601:13430/02:00001972 - isvavai.cz</a>

  • Result on the web

  • DOI - Digital Object Identifier

Alternative languages

  • Result language

    angličtina

  • Original language name

    Atomic force microscopy study of SnO2 thin films for gas sensor

  • Original language description

    The SnO2 thin films are widely used for gas sensor applications. In this work we have studied properties of SnO2 thin films produced by thermal evaporation of Sn films followed by in situ plasma oxidation. The structure of such SnO2 films and also theirchemical and physical properties depend on parameters governing the growth of these films during plasma oxidation, e.g. on both the plasma parameters and the substrate temperature. The effects of annealing modification of SnO2 films on the surface structure, composition, and electrical conductance of SnO2 films were studied.

  • Czech name

  • Czech description

Classification

  • Type

    D - Article in proceedings

  • CEP classification

    BL - Plasma physics and discharge through gases

  • OECD FORD branch

Result continuities

  • Project

    <a href="/en/project/OC%20527.50" target="_blank" >OC 527.50: Polymer Thin Films Study by AFM and Improvement of Plasma Diagnostics Methods</a><br>

  • Continuities

    P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>Z - Vyzkumny zamer (s odkazem do CEZ)

Others

  • Publication year

    2002

  • Confidentiality

    S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Data specific for result type

  • Article name in the collection

    National Conference NANO 02

  • ISBN

    80-7329-027-8

  • ISSN

  • e-ISSN

  • Number of pages

    4

  • Pages from-to

    270-273

  • Publisher name

    Repronis

  • Place of publication

    Ostrava

  • Event location

    Brno

  • Event date

    Nov 19, 2002

  • Type of event by nationality

    CST - Celostátní akce

  • UT code for WoS article