Preparation and Characterization of SnO2 Films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13430%2F03%3A00002341" target="_blank" >RIV/44555601:13430/03:00002341 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Preparation and Characterization of SnO2 Films
Original language description
Thin SnO2 films have wide range of applications (electronics, special coatings, etc.). Mostly, it is used when conductivity and transparency is required or in gas sensors. Tin oxide films can be prepared by many techniques such as chemical vapour deposition, spray pyrolysis, evaporation, and sputtering [1,2]. We have studied properties of SnO2 thin films produced by a thermal evaporation of Sn films followed by in situ plasma oxidation 3 . The structure of such SnO2 films and also their chemical and physical properties depend on parameters governing the growth during plasma oxidation, e.g. on both the plasma parameters and the substrate temperature. The influence of annealing and substrate heating during oxidation on the surface structure, composition,and electrical conductance of SnO2 films were studied.
Czech name
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Czech description
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Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
<a href="/en/project/OC%20527.50" target="_blank" >OC 527.50: Polymer Thin Films Study by AFM and Improvement of Plasma Diagnostics Methods</a><br>
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2003
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
The 41st Symposium on Basic of Ceramics
ISBN
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ISSN
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e-ISSN
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Number of pages
1
Pages from-to
20
Publisher name
Ceramic Society of Japan
Place of publication
Kaghoshima
Event location
Kagoshima - Japan
Event date
Jan 22, 2003
Type of event by nationality
WRD - Celosvětová akce
UT code for WoS article
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