Composite Sn/hydrocarbon plasma polymer thin films and their basic properties

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F07%3A00003906" target="_blank" >RIV/44555601:13440/07:00003906 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Result language
angličtina
Original language name
Composite Sn/hydrocarbon plasma polymer thin films and their basic properties
Original language description
Nanocomposite Sn/C:H layers were prepared by RF magnetron sputtering from tin target in argon and n-hexane mixture. The chemical composition of deposited films was characterized by XPS and SIMS. Heterogeneous nanostructure of the layers was proven by TEM. Surface topography was examined by AFM. Basic properties of the deposition process were studied.
Czech name
Kompozitní tenké vrstvy Sn/plazmový polymer a jejich základní vlastnosti
Czech description
Nanokompozitní vrstvy Sn/C:H bly připraveny RF magnetronovým naprašováním z cínového terče ve směsi argonu s n-hexanem. Chemické složení vstev bylo stanoveno z XPS a SIMS měření. TEM měření prokázala heterogenní strukturu vrstev. Byly studovány základníparametry procesu depozice.

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

Article name in the collection
Full-Papers CD-18th International Symposium on Plasma Chemistry
ISBN
978-4-9903773-2-8
ISSN
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e-ISSN
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Number of pages
4
Pages from-to
448-451
Publisher name
Kyoto University, Japan
Place of publication
Kyoto, Japan
Event location
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Event date
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Type of event by nationality
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UT code for WoS article
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