A single target RF magnetron co-sputtered iron doped tin oxide films with pillars

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F11%3A10005060" target="_blank" >RIV/44555601:13440/11:10005060 - isvavai.cz</a>
Result on the web
<a href="http://www.sciencedirect.com/science?_ob=MiamiImageURL&_cid=271582&_user=640945&_pii=S0042207X1100008X&_check=y&_origin=&_coverDate=25-Feb-2011&view=c&wchp=dGLzVlV-zSkzV&md5=895382bc98fe0230ffda9edfc085b6d9/1-s2.0-S0042207X1100008X-main.pdf" target="_blank" >http://www.sciencedirect.com/science?_ob=MiamiImageURL&_cid=271582&_user=640945&_pii=S0042207X1100008X&_check=y&_origin=&_coverDate=25-Feb-2011&view=c&wchp=dGLzVlV-zSkzV&md5=895382bc98fe0230ffda9edfc085b6d9/1-s2.0-S0042207X1100008X-main.pdf</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.vacuum.2010.12.013" target="_blank" >10.1016/j.vacuum.2010.12.013</a>

Result language
angličtina
Original language name
A single target RF magnetron co-sputtered iron doped tin oxide films with pillars
Original language description
The SnO2 gas sensors and catalytic surfaces are produced by different techniques with a wide range of dopants improving their selectivity and sensitivities. The surface topology is important because the active surface area can be enlarged dramatically byemploying nanostructures. Many reported techniques for the tin oxide nanostructures preparation require fine powders or liquid precursors together with high temperatures above 500 degrees C. But the nanostructures can be formed by the RF off-axis magnetron sputtering technique at room temperature from a bulk target. The single target co-sputtering of SnO2 target with Fe inset was used to deposit SnO2 film doped by iron. The 400 nm diameter pillars were successfully deposited in controllable density onpolished Si substrates at low pressure 0.3 Pa of argon and oxygen gas mixture. The pillars were not formatted at the beginning of deposition process but certain SnO2 film was required. The surface around the pillars was flat without any s
Czech name
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Czech description
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Type
J<sub>x</sub> - Unclassified - Peer-reviewed scientific article (Jimp, Jsc and Jost)
CEP classification
BG - Nuclear, atomic and molecular physics, accelerators
OECD FORD branch
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Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)

Publication year
2011
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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