Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F07%3A00003909" target="_blank" >RIV/44555601:13440/07:00003909 - isvavai.cz</a>
Result on the web
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DOI - Digital Object Identifier
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Alternative languages
Result language
angličtina
Original language name
Study of SnO2 Thin Films Prepared by Plasma Assisted Deposition Techniques
Original language description
Thin films of oxide materials have high potential for device applications. Development of gas sensors in last few years has shown an important interest in thin tin oxide films. The SnO2 is one of the most widely used materials for gas sensor applicationsdue to their good performance for a detection of oxidable gases. When SnO2 layers are used in gas sensors, some features can depend on many layer parameters as thickness, cluster size, roughness, etc. Since the properties of the material are strongly dependent on the procedure of preparation, different techniques have been employed to obtain SnO2 thin films [1, 2, 3, 4]. In this work we have studied surface properties and tructure of SnO2 thin films prepared both by plasma oxidation of the thin tin films [5] and by RF or DC magnetron reactive sputtering of tin target in oxygen + argon mixture tmosphere. Tin dioxide films were prepared by RF sputtering of SnO2 target using argon or oxygen as working gas, too.
Czech name
Studium tenkých vrstev SnO2 připravených depozičními technikami za asistence plazmatu
Czech description
V této práci byly studovány povrchové a strukturální vlastnosti tenkých vrstev SnO2 připravených plazmovou oxidací tenkých cínových vrstev a RF, DC reaktivním naprašováním cínu ve směsi kyslíku a argonem.
Classification
Type
D - Article in proceedings
CEP classification
BL - Plasma physics and discharge through gases
OECD FORD branch
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Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2007
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Article name in the collection
Proceedings of 16th-Symposium on Application of Plasma Processes
ISBN
978-80-89186-13-6
ISSN
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e-ISSN
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Number of pages
2
Pages from-to
245-246
Publisher name
Comenius University Press
Place of publication
Bratislava, Slovensko
Event location
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Event date
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Type of event by nationality
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UT code for WoS article
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