Optimization of sputtered ZnO transparent conductive seed layer for flexible ZnO-nanorod-based devices

Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F44555601%3A13440%2F17%3A43892828" target="_blank" >RIV/44555601:13440/17:43892828 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23520/17:43932094 RIV/49777513:23640/17:43932094
Result on the web
<a href="http://www.sciencedirect.com/science/article/pii/S0040609017301062" target="_blank" >http://www.sciencedirect.com/science/article/pii/S0040609017301062</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1016/j.tsf.2017.02.017" target="_blank" >10.1016/j.tsf.2017.02.017</a>

Result language
angličtina
Original language name
Optimization of sputtered ZnO transparent conductive seed layer for flexible ZnO-nanorod-based devices
Original language description
The fabrication of inorganic transparent conductive oxide films on polymer substrates has been of increasing interest due to their potential applications in the field of flexible electronics. The subject of the present work is replacing the preferably-used indiumtin oxide films by an aluminiumzinc oxide (AZO) film in ZnO-nanorod-based devices, combining the role of the seed layer for nanorod growth with a sheet resistance lower than 100?/sq. The investigated AZO films with thickness up to 300 nmwere deposited on 150 ?mthick polyethylene terephthalate substrates by (i) radio-frequency magnetron sputtering froma ZnO/Al2O3 target and (ii) co-sputtering from ZnO and Al targets in an argon atmosphere. AZO films with good transparency and thickness of 160 nm and sheet resistance lower than 100?/sq.were prepared by co-sputtering. It was found that co-sputtering leads to lower film resistivity due to better activation of Al atoms in the AZO film. ZnO nanorod growth was demonstrated on both types of film, and the co-sputtered AZO films were covered by a pure (undoped) ZnO film to improve the ZnO nanorod morphology.
Czech name
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Czech description
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Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
10302 - Condensed matter physics (including formerly solid state physics, supercond.)

Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)<br>I - Institucionalni podpora na dlouhodoby koncepcni rozvoj vyzkumne organizace

Publication year
2017
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů

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