Influence of oxygen on the resistivity of co-sputtered transparent AZO films
The result's identifiers
Result code in IS VaVaI
<a href="https://www.isvavai.cz/riv?ss=detail&h=RIV%2F49777513%3A23520%2F18%3A43951601" target="_blank" >RIV/49777513:23520/18:43951601 - isvavai.cz</a>
Alternative codes found
RIV/49777513:23640/18:43951601
Result on the web
<a href="http://dx.doi.org/10.1002/pssa.201700951" target="_blank" >http://dx.doi.org/10.1002/pssa.201700951</a>
DOI - Digital Object Identifier
<a href="http://dx.doi.org/10.1002/pssa.201700951" target="_blank" >10.1002/pssa.201700951</a>
Alternative languages
Result language
angličtina
Original language name
Influence of oxygen on the resistivity of co-sputtered transparent AZO films
Original language description
In the present work co-sputtering from ceramic and metallic targets is used to reduce the oxygen content in aluminium doped zinc oxide. Films with thickness between 200 and 220 nm are sputtered at 100 and 250 °C and investigated by X-ray diffraction, energy dispersive spectroscopy, and Hall measurements. It is found that reducing of the incorporated oxygen in the film leads to higher carrier concentration, mainly due to better effective activation of Al donors. Higher temperatures result in better carrier mobility due to improving the crystallinity. The best resistivity of 1.4 × 10−3 Ω cm of the highly transparent film prepared at 100 °C is achieved. A larger oxygen reduction leads to lower resistivity, but also results in the significant deterioration of transmittances.
Czech name
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Czech description
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Classification
Type
J<sub>imp</sub> - Article in a specialist periodical, which is included in the Web of Science database
CEP classification
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OECD FORD branch
20506 - Coating and films
Result continuities
Project
Result was created during the realization of more than one project. More information in the Projects tab.
Continuities
P - Projekt vyzkumu a vyvoje financovany z verejnych zdroju (s odkazem do CEP)
Others
Publication year
2018
Confidentiality
S - Úplné a pravdivé údaje o projektu nepodléhají ochraně podle zvláštních právních předpisů
Data specific for result type
Name of the periodical
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
ISSN
1862-6300
e-ISSN
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Volume of the periodical
215
Issue of the periodical within the volume
13
Country of publishing house
DE - GERMANY
Number of pages
5
Pages from-to
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UT code for WoS article
000438358000013
EID of the result in the Scopus database
2-s2.0-85043353704